Method of manufacturing a microstructure
AssigneeSamsung Electronics Co., Ltd.
InventorsYong-seop Yoon, Hyung Choi
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Abstract
A method of manufacturing a micromirror actuator includes forming a trench on a substrate by etching, laminating a film-type organic layer on the substrate to cover but not fill the trench so that the trench is maintained hollow, and depositing and patterning a metal layer on the film-type organic layer and removing the film-type organic layer. According to the method of manufacturing a micromirror actuator, a micromirror can be easily planarized by laminating the film-type organic layer on the substrate including the trench, which reduces the cost of manufacturing the micromirror actuator and increases a reflectivity of the micromirror actuator by increasing the flatness level of the micromirror so as to enhance an optical transmission efficiency.
Claims24
A method of manufacturing a micromirror actuator comprising:
- etching to from a trench on a substrate;
- laminating a film-type organic layer on the substrate to cover but not fill the trench so that the trench remains hollow;
- depositing and patterning a metal layer on the film-type organic layer;
- and
- removing the film-type organic layer.
A method of manufacturing a micromirror actuator comprising:
- forming a temporary layer on a substrate having a trench, where the temporary layer covers but does not fill the trench;
- depositing and patterning a metal layer on the temporary layer;
- and
- removing the temporary layer.
A method of manufacturing a microstructure using a semiconductor process, comprising:
- laminating a film-type organic layer on an uneven layer deposited during the manufacture of the microstructure to planarize the uneven layer,
- wherein the laminating the film-type organic layer on the uneven layer comprises laminating the film-type organic layer on the uneven layer deposited during the manufacture of the microstructure to planarize the uneven layer so as to define a void between the organic layer and the uneven layer.
Dependencies are inferred from the claim text.