Substrate holder for lithographic apparatus

Abstract

An intermediate substrate holder for use in a lithographic projection apparatus, which holder can itself be held by a standard substrate holder in the lithographic projection apparatus and in turn can hold a non-standard substrate. The intermediate substrate holder includes at least one of a vacuum holder and a mechanical clamp. The vacuum holder includes a vacuum space on which the non-standard substrate is placed; a barrier around the edge of the vacuum space that closes off the vacuum space and that makes a sealing contact with the non-standard substrate; and a vacuum generator. The mechanical clamp may include two or more stationary positioning pins opposed by a slidable mechanism which is provided with at least one sliding positioning pin mounted thereon and which is biased to move the sliding positioning pin towards the stationary pins.

Dependencies are inferred from the claim text.