Semiconductor wafer storage kiosk
AssigneeIntrabay Automation, Inc.
InventorPaul S. Whalen
Life of this patent
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AssigneeIntrabay Automation, Inc.
InventorPaul S. Whalen
Estimating the term…
A semiconductor wafer cassette storage cabinet or stocker having a retrieval and transfer system constructed in the form of a kiosk encircling a pick-up and transfer apparatus. The structure is formed of a plurality of identical sections having wall panels and roof panels joined together to form a nearly semi-circular enclosure around the pick-up and transfer apparatus. Each section has multiple level input/output ports adjacent to each other with a shelf for supporting a semiconductor wafer cassette. Shelves at the input/output ports are constructed of rails supporting drive rollers and a photodetector to activate the drive rollers to fill an output port whenever a cassette has been retrieved and transferred. One embodiment with five identical sections can store and retrieving up to twenty semiconductor wafer cassettes while an optional embodiment with seven identical sections can store twenty-eight semiconductor wafer cassettes.
A system for storing, retrieving, and transferring semiconductor wafer cassettes comprising;
Dependencies are inferred from the claim text.