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US 6,582,085 B2Granted
Semiconductor chip and its manufacturing method
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorRyuichi Kosugi
Life of this patent
Estimating the term…
Abstract
A silicon wafer has a plurality of chip portions and a plurality of street portions. Each of the street portions runs and spaces between neighboring chip portions. The wafer also has circuits each provided on the street portions. The circuit is reinforced by a reinforcing portion. The reinforcing portion is provided on the circuit before dicing and then cut out in part by dicing so that it remains in part on at least one end portion of the circuit, adjacent to the chip portions, after dicing.
Claims2
A semiconductor chip having a chip portion and a street adjacent the chip portion comprises:
- a lower insulation layer on the street and having a width extending from an edge portion of the street to a side of the chip portion:
- a metal layer on the lower insulation layer and having a width extending from the edge portion of the street by a little behind the lower insulation layer:
- an upper insulation layer on the lower insulation layer and portions of the metal layer adjacent to the side surface thereof;
- and
- an end portion of a circuit on an upper surface of the metal layer and an upper surface of the upper insulation layer.
2 more elements
Dependencies are inferred from the claim text.