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US 6,578,592 B1Granted
Processing apparatus with horizontally movable enclosing element
AssigneeTokyo Electron Limited
InventorsYuji Kamikawa, Takehiko Orii, Kyouji Kohama
Life of this patent
Estimating the term…
Abstract
A cleaning system has a movable outer tubular member (26) and a movable inner tubular member (27). A bottom part of the inner tubular (27) is inclined. A first drain pipe (47) is connected to the inner tubular member (27). The first drain pipe (47) has an end part slidably inserted into a second drain pipe (76).
Claims23
A processing apparatus for processing an object with processing liquid, comprising:
- a holder that holds the object;
- an enclosing element capable of moving between a first position where the enclosing element surrounds the holder and forms a closed processing chamber in which the object is processed and a second position where the enclosing element is withdrawn from around the holder, the enclosing element having a first end on a side of the first position and a second end on a side of the second position, and the enclosing element being provided with a drain port, through which the processing liquid is drained, at a lowermost portion of the second end of the enclosing element;
- a first drain pipe connected to the drain port;
- and
- a nozzle that supplies the processing liquid into the processing chamber.
2 more elements
A processing apparatus for processing an object with a processing liquid, comprising:
- a holder adapted to hold the object;
- and
- an enclosing element adapted to surround the holder to define a closed processing chamber, in which the object held by the holder is processed;
- wherein the enclosing element includes:
- a cylindrical body having a center axis extending in a horizontal direction;
- and
- a channel-forming member provided at a lowermost portion of the cylindrical body to define a channel into which the processing liquid is collected, the channel extending in an axial direction of the cylindrical body, and the channel-forming member having a first end and a second end and having a bottom sloping downward toward the second end, and
- wherein the enclosing element is provided with a drain port arranged adjacent to the second end of the channel to drain the processing liquid from the processing chamber.
5 more elements
A processing apparatus for processing an object with a processing liquid, comprising:
- a holder adapted to hold the object;
- and
- an enclosing element adapted to surround the holder to define a closed processing chamber, in which the object held by the holder is processed;
- wherein:
- the enclosing element includes a body having an oblique, circular, truncated cone shape, the body having a first circular end of relatively small diameter and a second circular end of a large diameter relative to the first circular end;
- the body is configured and arranged so that a first generator of the cone located at an uppermost portion of the body extends in a horizontal direction, and a second generator of the cone located at an lowermost portion of the body slopes downward from the first end toward the second end;
- and
- the enclosing element is provided with a drain port arranged adjacent to a lowermost portion of the second end of the body to drain the processing liquid from the processing chamber.
5 more elements
Dependencies are inferred from the claim text.