Method for reducing capacitive coupling between conductive lines
AssigneeMicron Technology, Inc.
InventorsKin F. Ma, Eric T. Stubbs
Life of this patent
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Abstract
An embodiment of the present invention discloses a memory device having an array with digit lines arranged in complementary pairs, the array comprising; a substantially planar layer having trenches therein; a first level of digit lines residing at least partially in the trenches; a second level of digit lines residing on the surface of the layer, the second level extending in generally parallel relation to the digit lines in the first level. The first level of digit lines are in alternating positions with the second level of digit lines and the alternating positions comprise a repeating pattern of a first complementary pair of digit lines at the first level adjacent a second complementary pair of digit lines at the second level.
Claims9
A two level conductive structure in a semiconductor device, said structure comprising:
- an insulation layer having a top surface, said top surface establishing a reference plane;
- first level conductive lines residing in said insulation layer and lying below said reference plane while being in contact therewith;
- second level conductive lines lying above said reference plane while being in contact therewith, said second level conductive lines being laterally offset from said first level conductive lines such that no conductive line of said second level makes contact to any conductive line of said first level, wherein said first level conductive lines and said second level conductive lines comprise digit lines of a semiconductor memory device.
A memory device having digit lines with a first portion of said digit lines at a first level lying above and making contact with a reference plane defined by a top surface of an insulation material and a second portion of said digit lines at a second level lying below and making contact with said reference plane, said second level being laterally offset from said first level and extending in generally parallel relation thereto;
- wherein, none of said digit lines of said second level directly underlies any of said digit lines of said first level.
Dependencies are inferred from the claim text.