Projection imaging system with a non-circular aperture and a method thereof
AssigneeRochester Institute of Technology
InventorsBruce W. Smith, John S. Petersen
Life of this patent
Estimating the term…
Abstract
A imaging tool for use with a mask with features oriented along at least an x-axis or a y-axis where the x-axis extends in directions substantially perpendicular to the directions of the y-axis. The tool has a condenser lens with a condenser plate which is located in a condenser lens pupil plane and which has a condenser aperture with four-sides. The sides of the condenser aperture are oriented in substantially the same direction as either the x-axis or the y-axis. The condenser lens is positioned to place at least a portion of any illumination on at least a portion of the mask.
Claims24
An imaging tool for use with a mask with features oriented along at least an x-axis or a y-axis, the x-axis extending in directions substantially perpendicular to the directions of the y-axis, the tool comprising a condenser lens with a condenser aperture having four-sides and located in a condenser lens pupil plane, the sides of the condenser aperture oriented in substantially the same direction as either the x-axis or the y-axis, the condenser lens positioned to place at least a portion of any illumination on at least a portion of the mask.
A projection imaging system comprising:
- a mask with features oriented along at least an x-axis or a y-axis, the x-axis extending in directions substantially perpendicular to the directions of the y-axis;
- a condenser lens with a condenser aperture having four-sides and located in a condenser lens pupil plane, the sides of the condenser aperture oriented in substantially the same direction as either the x-axis or the y-axis;
- and
- an illuminator which illuminates at least a portion of the condenser lens through the condenser aperture onto at least a portion of the mask.
A method for lithography comprising:
- illuminating at least a portion of a condenser lens pupil plane of a condenser lens;
- and
- directing at least a portion of the illumination passing through the condenser lens onto at least a portion of a mask, wherein the mask has features oriented along at least an x-axis or y-axis, the x-axis extending in directions substantially perpendicular to the directions of the y-axis, and the condenser lens has a condenser aperture located in the condenser lens pupil plane, the condenser aperture having four-sides, each of the sides of the condenser aperture oriented in substantially the same direction as either the x-axis or the y-axis.
An imaging tool for use with a mask with features oriented along at least an x-axis or a y-axis, the x-axis extending in directions substantially perpendicular to the directions of the y-axis, the tool comprising a condenser lens with a non-circular condenser aperture having multiple sides and located in a condenser lens pupil plane, at least one of the sides of the condenser aperture oriented in substantially the same direction as either the x-axis or the y-axis.
A projection imaging system comprising:
- a mask with features oriented along at least an x-axis or a y-axis, the x-axis extending in directions substantially perpendicular to the directions of the y-axis;
- a condenser lens with a non-circular condenser aperture having multiple sides and located in a condenser lens pupil plane, at least one of the sides of the condenser aperture oriented in substantially the same direction as either the x-axis or the y-axis;
- and
- an illuminator which illuminates at least a portion of the condenser lens through the condenser aperture onto at least a portion of the mask.
A method for lithography comprising:
- illuminating at least a portion of a condenser lens pupil plane of a condenser lens;
- and
- directing at least a portion of the illumination passing through the condenser lens onto at least a portion of a mask, wherein the mask has features oriented along at least an x-axis or y-axis, the x-axis extending in directions substantially perpendicular to the directions of the y-axis, and the condenser lens has a non-circular condenser aperture located in the condenser lens pupil plane, the condenser aperture having multiple sides, at least one of the sides of the condenser aperture oriented in substantially the same direction as either the x-axis or the y-axis.
Dependencies are inferred from the claim text.