Semiconductor device and producing method thereof
AssigneeKabushiki Kaisha Toshiba
InventorsKazuyuki Higashi, Noriaki Matsunaga, Akihiro Kajita, Tamao Takase, Hisashi Kaneko, Hideki Shibata
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Abstract
The present invention is a method of producing a semiconductor device in which at least one alignment mark to be used in an exposure process of a lithographic process is formed of a wiring material which is copper or includes copper as a main component, and the alignment mark is formed entirely in an area outside an area where dicing is to be executed.
Claims12
A semiconductor device comprising:
- a first region in which an integrated circuit is not provided;
- a second region which is surrounded by the first region and in which an integrated circuit is provided;
- and
- an alignment mark containing copper, which is entirely provided inside an area including the first and second regions without being in contact with an edge of the semiconductor device, and which crosses a boundary between the first and second regions.
A semiconductor device including a first region having no integrated circuit and a second region surrounded by the first region, the semiconductor device comprising:
- an integrated circuit being provided inside the second region and having a wiring containing copper;
- and
- an alignment mark which is formed of the same material as the wiring, which is entirely provided inside an area including the first and second regions without being in contact with an edge of the semiconductor device, and which crosses a boundary between the first and second regions.
A semiconductor device comprising:
- a first region provided along an edge of the semiconductor device;
- a second region being surrounded by the first region and including an integrated circuit;
- and
- an alignment mark containing copper, which is entirely provided inside an area including the first and second regions without being in contact with the edge of the semiconductor device, and which crosses a boundary between the first and second regions.
A semiconductor device including a first region provided along an edge of the semiconductor device and a second region surrounded by the first region, the semiconductor device comprising:
- an integrated circuit being provided inside the second region and comprising a wiring containing copper;
- and
- an alignment mark which is formed of the same material as the wiring, which is entirely provided inside an area including the first and second regions without being in contact with the edge of the semiconductor device, and which crosses a boundary between the first and second regions.
Dependencies are inferred from the claim text.