Water-soluble resin composition
AssigneeClariant Finance (BVI) Limited
InventorsTakashi Kanda, Hatsuyuki Tanaka
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AssigneeClariant Finance (BVI) Limited
InventorsTakashi Kanda, Hatsuyuki Tanaka
Estimating the term…
A water-soluble resin composition comprising (1) a water-soluble resin, (2) a water-soluble crosslinking agent, (3) at least one of surface active agents selected from acetylene alcohols, acetylene glycols, polyethoxylates of acetylene alcohols and polyethoxylates of acetylene glycols, and (4) a solvent consisting of water or a mixture of water and a water-soluble solvent. This water-soluble resin composition is applied onto a resist pattern, then heated to crosslink by an acid supplied from the resist, followed by development to remove the non-crosslinked water-soluble resin coating layer. This water-soluble resin composition is excellent in coating characteristics on steps of resist patterns and in dimensional regulation upon fining of patterns so that resist patterns such as trench patterns and hole patterns can effectively be fined.
A water-soluble resin composition comprising a water-soluble resin, a water-soluble crosslinking agent, a surface active agent and a solvent and capable of a crosslinking reaction in the presence of an acid, wherein said surface active agent is at least one member selected from acetylene alcohols, acetylene glycols, acetylene alcohol polyethoxylates, and acetylene glycol polyethoxylates;
Dependencies are inferred from the claim text.