Method for preventing Cu CMP corrosion

A method for preventing or reducing corrosion of copper containing semiconductor features during chemical mechanical polishing (CMP) comprising the steps of:

• providing a semiconductor wafer polishing surface including a copper layer overlying a copper filled anisotropically etched feature;
• polishing the semiconductor wafer polishing surface according to a first CMP process including applying at least one polishing slurry to contact the semiconductor wafer polishing surface to remove at least a portion the copper layer to reveal a portion of an underlying barrier/adhesion layer;
• polishing the semiconductor wafer polishing surface according to a second CMP process including applying a neutralizing solution to contact the semiconductor wafer polishing surface to neutralize a semiconductor wafer polishing surface including chemical potentials;
• polishing the semiconductor wafer polishing surface according to a third CMP process including applying a copper corrosion inhibitor solution to contact the semiconductor wafer polishing surface to inhibit copper corrosion;
• and,
• polishing the semiconductor wafer polishing surface according to at least a fourth CMP process to remove a remaining portion of the underlying barrier/adhesion layer.