Gas polishing method, gas polishing nozzle and polishing apparatus
AssigneeEbara Corporation
InventorsSyuhei Shinozuka, Kaori Miyoshi, Akira Fukunaga
Life of this patent
Estimating the term…
Abstract
A gas jetting nozzle is used for etching an object to be etched by jetting etching gas onto the object from the gas jetting nozzle. A gas jetting pipe for jetting an etching gas and a suction pipe for discharging the jetted gas are provided to have a coaxial dual pipe structure. The etching gas is jetted from the gas jetting pipe toward the object for etching and, at the same time, excess etching gas for reaction is discharged through the suction pipe.
Claims8
A gas jetting and evacuating nozzle for jetting etching gas toward an object to be etched and evacuating excess etching gas, comprising:
- a gas jetting pipe adapted to jet an etching gas;
- and
- a suction pipe adapted to evacuate the jetted gas;
- wherein said gas jetting pipe and said suction pipe form a coaxial dual pipe structure;
- wherein said gas jetting pipe has a tip end having an etching gas flow path that is linearly parallel with said coaxial dual pipe structure;
- and
- wherein said tip end of said gas jetting pipe entends outwardly beyond a tip end of said suction pipe.
A gas etching apparatus, comprising:
- a reaction vessel;
- a gas jetting and evacuating nozzle for jetting etching gas toward an object to be etched and evacuating excess etching gas, comprising a gas jetting pipe adapted to jet an etching gas and a suction pipe adapted to evacuate the jetted gas, wherein said gas jetting pipe and said suction pipe form a coaxial dual pipe structure, said dual pipe structure communicating with said reaction vessel;
- and
- means for jetting an etching gas from said gas jetting pipe onto an etching portion of an object to be etched positioned within said reaction vessel and simultaneously removing excess etching gas through said suction pipe;
- wherein said gas jetting pipe has a tip end having an etching gas flow path that is linearly parallel with said coaxial dual pipe structure;
- and
- wherein said tip end of said gas jetting pipe extends outwardly beyond a tip end of said suction pipe.
Dependencies are inferred from the claim text.