Flying image of a maskless exposure system
AssigneeBall Semiconductor, Inc.
InventorWenhui Mei
Life of this patent
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Abstract
A system for image-scanning a pixel-mask pattern onto a subject, such as a subject in digital photolithography, is provided. The system includes a pixel panel for generating a pixel pattern formed of pixel elements. A lens system positioned between the panel and the subject simultaneously directs the pixel elements to the subject. A mirror positioned between the panel and the subject enables the system to direct the pixel elements to a portion of the subject at any one time. A computing system may be used to generate the pixel elements and provide the pixel elements to the panel in a predetermined sequence.
Claims11
A system for image-scanning a pixel-mask pattern onto a subject, the system comprising:
- a panel for generating a pattern comprising a plurality of pixel elements, each pixel element being of a potential on or off state independent of any other pixel element;
- a lens system positioned between the panel and the subject for simultaneously directing the pixel elements to the subject;
- a mirror positioned between the panel and the subject for directing the pixel elements to a portion of the subject at any one time;
- and
- means for moving the mirror to scan the pixel elements across the subject, the moving means scanning at a rate whereby at least two pixel elements overlap the same portion of the subject.
Dependencies are inferred from the claim text.