Charge pump device formed on silicon-on-insulator and operation method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorMin-hwa Chi
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorMin-hwa Chi
Estimating the term…
A charge pump formed in a silicon-on-insulator (SOI) substrate is disclosed. The charge pump comprises a SOI layer formed on a substrate. Formed in the silicon of the SOI is a first p-body and a second p-body. Also formed in the silicon is a n+ region that extends down to the insulator so that the n+ region separates the first p-body and second p-body. Finally, a gate structure is formed atop of a portion of the first p-body and a portion of the n+ region. The gate structure is separated from the 1st p-body and n+ region by gate oxide, and it serves as charge pump capacitor. Both the diode turn-on (when gate is pulsing high and forward biasing the p-body to n+ junction), and GIDL current (when the gate is pulsing low, and generates GIDL hole currents from n+ surface to p-body) will result in a “short” of the p-body and n+ region; this ensures the proper operation of charge pump.
A charge pump formed in a silicon-on-insulator (SOI) substrate comprising:
A charge pump formed in a silicon-on-insulator (SOI) substrate comprising:
A method for operating a charge pump formed on a silicon-on-insulator (SOI) substrate, said charge pump comprising:
A method for operating a charge pump formed on a silicon-on-insulator (SOI) substrate, said charge pump comprising:
Dependencies are inferred from the claim text.