Back to results
US 6,551,470 B1Granted
Clamp and target assembly
AssigneeAcademy Precision Materials
InventorBruce W. Webb
Life of this patent
Estimating the term…
Abstract
A target assembly comprising a clamp and a target where, in a preferred embodiment, the need for bonding and/or a backing plate is eliminated.
Claims45
A target assembly separate from an installation assembly for PVD processing equipment comprising:
- a target in a stepped shape comprising a consumable center portion;
- and
- a reusable clamp outer component in a stepped shape and mounted to said stepped shaped target via steps corresponding to steps of said target, said clamp comprising at least one aperture for receiving at least one ear disposed on said separate installation assembly;
- wherein said clamp clamps said target assembly to the installation assembly of the processing equipment.
1 more element
A target assembly separate from an installation assembly for PVD processing equipment comprising:
- a target in a stepped shape comprising a consumable center portion;
- and
- a reusable clamp outer component in a stepped shape and mounted to said stepped shape target via steps corresponding to steps of said target;
- wherein said clamp clamps said target assembly to the installation assembly of the processing equipment and a clamp assembly attaches to the processing equipment through rotation of said target assembly about a central axis of said assembly, wherein said rotation engages at least one ear disposed on a separate installation, assembly within at least one internal member of said clamp selected from the group consisting of horizontal surfaces, inclined surfaces, grooved surfaces, and declined surfaces.
1 more element
A method of using a target assembly with processing equipment comprising the steps of:
- a) providing a target assembly separate from an installation assembly comprising providing a target in a stepped shape comprising a consumable center portion and a reusable clamp, the clamp comprising at least one internal member selected from the group consisting of horizontal surfaces, inclined surfaces grooved surfaces, and denclined surfaces, wherein the clamp clamps the target to the processing equipment;
- and
- b) clamping the target assembly to an installation assembly of the processing equipment.
A method of using a target assembly with processing equipment comprising the steps of:
- a) providing a target assembly separate from an installation assembly comprising providing a target in a stepped shape comprising a consumable center portion and a reusable clamp, the clamp comprising at least one internal member selected from the group consisting of horizontal surfaces, inclined surfaces, grooved surfaces, and declined surfaces, wherein the clamp clamps the target to the processing equipment;
- and
- b) clamping the target assembly to an installation assembly of the processing equipment;
- c) operating the processing equipment to diminish the weight of the target;
- d) removing the target assembly from the process equipment;
- and
- e) determining the weight of the target.
4 more elements
A method of using a target assembly with processing equipment comprising the steps of:
- a) providing a target assembly separate from an installation assembly comprising providing a target in a stepped shape comprising a consumable center portion and a reusable clamp;
- b) clamping the target assembly to an installation assembly of the processing equipment;
- and
- c) attaching a clamp assembly to the processing equipment through rotation of the target assembly about a central axis of the assembly, wherein the rotation engages at least one ear disposed on a separate installation assembly within at least one internal member of said clamp selected from the group consisting of horizontal surfaces, inclined surfaces, grooved surfaces, and declined surfaces.
1 more element
A method of using a target assembly with processing equipment comprising the steps of:
- a) providing a target assembly separate from an installation assembly comprising providing a target in a stepped shape comprising a consumable center portion and a reusable clamp;
- b) clamping the target assembly to an installation assembly of the processing equipment;
- and
- c) attaching a clamp assembly to the processing equipment through rotation of the target assembly about a central axis of the assembly, wherein the rotation engages at least one ear disposed on a separate installation assembly within at least one internal member of said clamp selected from the group consisting of horizontal surfaces, inclined surfaces, grooved surfaces, and declined surfaces;
- d) operating the process equipment to diminish the weight of the target;
- e) removing the target assembly from the process equipment;
- and
- f) determining the weight of the target.
5 more elements
Dependencies are inferred from the claim text.