Tool and method for in situ vapor phase deposition source material reloading and maintenance
AssigneeBoard of Trustees of the University of Arkansas
InventorsPaul M. Thibado, Vincent P. LaBella, Daniel W. Bullock
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Abstract
A tool and method for reloading source materials in a vapor phase deposition (VPD) environment is disclosed. The tool and method does not require the venting of the VPD environment in order to perform its functions. The tool may reload source material into effusion cells or electron beam cells of a molecular beam epitaxy (MBE) machine without venting the growth chamber.
Claims19
A device for reloading source materials in a maintained vacuum environment comprising a vacuum chamber and a effusion cell, said device comprising:
- (a) a tube adapted to hold a source material when the source material is in a solid state, and release the source material when the source material is in a liquid state, wherein said tube has a hole at one end through which source material in a liquid state may flow into the effusion cell;
- and
- (b) a transfer arm in communication with said container, wherein said transfer arm is operable from without said vacuum chamber to position said container to receive the source material in a solid state, transport the source material through the vacuum chamber, and deposit the source material into the effusion cell in a liquid state.
An apparatus for the creation of crystals by vapor-phase deposition using at least one source material, said apparatus comprising:
- (a) a vacuum chamber;
- (b) a effusion cell mounted to said vacuum chamber;
- (c) a transfer arm operable from without said vacuum chamber, and
- (d) a container in communication with said transfer arm, wherein said container is adapted to receive the source material when the source material is in a solid state and deposit the source material in the effusion cell when the source material is in a liquid state, wherein the longitudinal axis of said container lies at an angle of between 5 and 90 degrees inclusive to the longitudinal axis of said transfer arm.
A device for the loading of source material in a effusion cell of a vapor-phase deposition machine, said device comprising a cup portion comprising a proximate end and a distal end, wherein said cup portion has a large opening at said proximate end, and said cup portion has a small opening at said distal end.
Dependencies are inferred from the claim text.