Solvent pre-wet system for wafers

Abstract

A system for improving manufacture, said system including but not limited to a Polyimide solvent dispensing nozzle proximate to a Polyimide dispensing nozzle. In one embodiment, the Polyimide solvent dispensing nozzle proximate to a Polyimide dispensing nozzle further includes but is not limited to the Polyimide solvent dispensing nozzle coupled with a bracket assembly adjustable in three dimensions. In one embodiment, the Polyimide solvent dispensing nozzle coupled with a bracket assembly adjustable in three dimensions further includes but is not limited to a bracket assembly adjustable in an x-axis direction, y-axis direction, and z-axis direction. In one embodiment, the Polyimide solvent dispensing nozzle proximate to a Polyimide dispensing nozzle further includes but is not limited to the Polyimide solvent dispensing nozzle mounted on an arm holding the Polyimide dispensing nozzle. In one embodiment, the Polyimide solvent dispensing nozzle mounted on an arm holding the Polyimide dispensing nozzle further includes but is not limited to the Polyimide solvent dispensing nozzle mounted with a bracket assembly adjustable such that the Polyimide solvent dispensing nozzle is centerable over a wafer holder. In one embodiment, the Polyimide solvent dispensing nozzle is fed by a Polyimide solvent reservoir. In one embodiment, at least one dispense/suckback valve is interposed between the Polyimide solvent dispensing nozzle and the Polyimide solvent reservoir. In one embodiment, at least one air operated valve is operably connected with interposed between the Polyimide solvent dispensing nozzle and the Polyimide solvent reservoir.

Dependencies are inferred from the claim text.