Lithographic data verification method and photo mask manufacturing method

A method for verifying data for a lithographic device, characterized in:

• comparing a first lithographic data and a second lithographic data on the basis of data formats thereof;
• and
• according to the result of comparison based on the data formats, extracting data from said first lithographic data in said data format excluding data common to said second lithographic data as a first difference data, and extracting data from said second lithographic data in said data format excluding data common to said first lithographic data as a second difference data, to graphically compare said first difference data and said second difference data to conduct verification.

A method for manufacturing a photo mask, which makes a photo mask on the basis of lithographic data for a lithographic device, comprising:

• comparing a plurality of said lithographic data on the basis of data formats thereof;
• and
• according to the result of comparison based on the data formats, extracting data from individual lithographic data of said plurality of lithographic data excluding data common to all of the lithographic data as difference data corresponding to individual said lithographic data, and graphically comparing respective said difference data to conduct verification.

A method for manufacturing a photo mask, which makes a photo mask on the basis of lithographic data for a lithographic device, comprising:

• comparing a first lithographic data and a second lithographic data on the basis of data formats thereof;
• and
• according to the result of comparison based on the data formats, extracting data from said first lithographic data in said data format excluding data common to said second lithographic data as a first difference data, and extracting data from said second lithographic data in said data format excluding data common to said first lithographic data as a second difference data, to graphically compare said first difference data and said second difference data to conduct verification.