Method and apparatus for enhancing image contrast using intensity filtration
AssigneeLSI Logic Corporation
InventorKunal N. Taravade
Life of this patent
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Abstract
An intensity filter for deep UV lithography enhances contrast and also therefore increases the resolution of patterned images by passing only intensities that fall within a specific minimum threshold value, resulting in a more exact aerial image replicating the mask image. This device is a different approach to contrast enhancement that is distinguished from previous methods by eliminating the need for an extra layer of contrast enhancement on top of the resist, thereby reducing the number of processing steps in semiconductor fabrication.
Claims2
A filter for receiving an incident light and producing a modified and phase shifted light, the filter comprising:
- a first material having a first index of refraction that is equal to a first index of refraction value over an intensity range,
- a second material having a second index of refraction that is equal to the first index of refraction value over a lower portion of the intensity range, and which is not equal to the first index of refraction value over an upper portion of the intensity range,
- the first material and the second material having an interface which passes the incident light in the lower portion of the intensity range and diffracts the incident light in the upper portion of the intensity range, thereby producing modified light, and
- a phase shifter for receiving the modified light, phase shifting all the modified light, and producing the modified and phase shifted light.
Dependencies are inferred from the claim text.