Apparatus for measuring the focus of a light exposure system used for fabricating a semiconductor device
AssigneeSamsung Electric Co., Ltd.
InventorYoung-Chang Kim
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Abstract
An apparatus for measuring the focus of a light exposure system for selectively exposing a photosensitive plate to light rays in a process of fabricating a semiconductor device, wherein there is provided a focus measuring part having opaque region, transparent region, and a transparent electrode arranged in the transparent region, a conducting stage supporting the photosensitive plate; and a capacitance detector for measuring the capacitance between the transparent electrode and the conducting stage.
Claims8
An apparatus for measuring the focus of a light exposure system for selectively exposing a photosensitive plate to light rays in a process of fabricating a semiconductor device, comprising:
- a focus measuring part having opaque region, transparent region, and a transparent electrode arranged in said transparent region;
- a stage supporting said photosensitive plate;
- and
- a capacitance detector for measuring the capacitance between said transparent electrode and said stage.
Dependencies are inferred from the claim text.