Semiconductor device and manufacturing method of the same
AssigneeSony Corporation
InventorsHiroaki Ammo, Hiroyuki Miwa, Shigeru Kanematsu
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AssigneeSony Corporation
InventorsHiroaki Ammo, Hiroyuki Miwa, Shigeru Kanematsu
Estimating the term…
A semiconductor device causes less element characteristic fluctuation and hardly causes parasitic actions even when a wire having a barrier metal made of a titanium material is provided. The semiconductor device includes a MOS transistor provided on the surface side of a semiconductor substrate, a first silicon oxide film, a silicon nitride film and a second silicon oxide film provided on the semiconductor substrate while covering the MOS transistor, and a wire having a barrier metal made of titanium material and provided on the insulating film, wherein the silicon nitride film covers the MOS transistor and has an opening on an element isolating region for isolating the MOS transistors. The silicon nitride film is formed in one and the same process as that of a dielectric film of a capacitor element.
A semiconductor device including a substrate comprising:
A semiconductor device including a substrate comprising:
Dependencies are inferred from the claim text.