Semiconductor memory device with increased level of integration
AssigneeSamsung Electronics Co., Ltd.
InventorsKi-Soon Bae, Hoon-Chi Lee
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AssigneeSamsung Electronics Co., Ltd.
InventorsKi-Soon Bae, Hoon-Chi Lee
Estimating the term…
A semiconductor memory device and a method of manufacturing same, wherein landing pads are formed to contact source/drain regions of an access transistor in a memory cell array area and a first resistor device is formed in the peripheral circuit area, by depositing a first conductive layer on a semiconductor substrate having an access transistor formed thereon and patterning the first conductive layer. An interlayer insulation layer is deposited on the resultant structure, and a lower electrode and a dielectric layer having a high dielectric constant of a capacitor are formed to contact the source/drain region of the access transistor. By depositing a second conductive layer on the resultant structure having the dielectric layer and patterning the dielectric layer, a capacitor upper electrode is formed in the memory cell array area and a second resistor device is formed in the peripheral circuit area.
A semiconductor memory device having a memory cell array area and a peripheral circuit area, comprising:
A semiconductor memory device on a semiconductor substrate having a memory cell array area and a peripheral circuit area, comprising:
Dependencies are inferred from the claim text.