Organic anti-reflective coating polymer and preparation thereof

A method for preparing a polymer of the formula:

• said method comprising the steps of polymerizing a mixture of monomers under conditions sufficient to produce said polymer, wherein said mixture of monomers comprises a 9-anthraldehydeoximeacrylate monomer of the formula:
• and a hydroxyalkylacrylate monomer of the formula:
• wherein
• Ra and Rb are independently hydrogen or alkyl;
• R1 to R9 are independently hydrogen, hydroxy, alkoxycarbonyl, carboxyl, hydroxyalkyl, or optionally substituted C1-C5 alkyl, or alkoxyalkyl;
• w and x are mole fractions, each of which is independently in the range of from 0.01 to 0.99;
• and
• n is an integer of 1 to 4.

A polymer of the formula:

• wherein
• Ra, Rb, and Rc are independently hydrogen or alkyl;
• Rd is alkyl;
• R1 to R9 are independently hydrogen, hydroxy, alkoxycarbonyl, carboxyl, hydroxyalkyl, or optionally substituted C1-C5 alkyl, or alkoxyalkyl;
• w, x, and y are mole fractions, each of which is independently in the range of from 0.01 to 0.99;
• and
• n is an integer of 1 to 4.

A method for producing a polymer of the formula:

• said method comprising the steps of polymerizing a mixture of monomers under conditions sufficient to produce said polymer, wherein said mixture of monomers comprises a 9-anthraldehydeoximeacrylate monomer of the formula:
• a hydroxyalkylacrylate monomer of the formula:
• and an alkylacrylate monomer of the formula:
• wherein
• Ra, Rb, and Rc are independently hydrogen or alkyl;
• Rd is alkyl;
• R1 to R9 are independently hydrogen, hydroxy, alkoxycarbonyl, carboxyl, hydroxyalkyl, or optionally substituted C1-C5 alkyl, or alkoxyalkyl;
• w, x, and y are mole fractions, each of which is independently in the range of from 0.01 to 0.99;
• and
• n is an integer of 1 to 4.

An anti-reflective coating composition comprising a polymer selected from:

• and mixtures thereof,
• wherein
• Ra, Rb, and Rc are independently hydrogen or alkyl;
• Rd is alkyl;
• R1 to R9 are independently hydrogen, hydroxy, alkoxycarbonyl, carboxyl, hydroxyalkyl, or optionally substituted C1-C5 alkyl, or alkoxyalkyl;
• w, x, and y are mole fractions, each of which is independently in the range of from 0.01 to 0.99;
• and
• n is an integer of 1 to 4.

A method for preparing an anti-reflective coating on a substrate, said method comprising the steps of:

• (a) admixing an organic solvent and an anti-reflective coating polymer to produce at least a partially dissolved anti-reflective coating polymer solution, wherein said anti-reflective coating polymer comprises a polymer of the formula:
• or mixtures thereof,
• wherein
• Ra, Rb, Rc, and R12 are independently hydrogen or alkyl;
• Rd is alkyl;
• R1 to R9 are independently hydrogen, hydroxy, alkoxycarbonyl, carboxyl, hydroxyalkyl, or optionally substituted C1-C5 alkyl, or alkoxyalkyl;
• R10 and R11 are independently optionally substituted C1-C10 alkoxy;
• w, x, and y are mole fractions, each of which is independently in the range of from 0.01 to 0.99;
• and
• n is an integer of 1 to 4;
• (b) coating said anti-reflective coating polymer solution on a substrate;
• and
• (c) heating said coated substrate to form an anti-reflective polymer coated substrate.