Method for enabling access to micro-sections of integrated circuits on a wafer
AssigneeInfineon Technologies AG
InventorShoaib Hasan Zaidi
Life of this patent
Estimating the term…
Abstract
The present invention provides a method of enabling measurement access to small integrated circuit features that comprises selecting a feature of an integrated circuit on a wafer and providing access to the selected feature by removing a portion of the integrated circuit adjacent to the feature, thereby preserving the wafer.
Claims19
A method for enabling measurement access to a feature of an integrated circuit device on a wafer, comprising:
- selecting a feature of an integrated circuit device on a wafer;
- and
- providing access to the selected feature for measurement thereof without destroying the wafer, including removing a portion of the integrated circuit device adjacent to the selected feature by etching said portion away.
A method for enabling measurement access to a feature of an integrated circuit device on a wafer, comprising:
- selecting a feature of an integrated circuit device on a wafer;
- and
- providing access to the selected feature for measurement thereof without destroying the wafer, including removing a portion of the integrated circuit device adjacent to the selected feature, the removing step including applying a coating to the wafer and placing a mask on the wafer, the mask revealing an area of the integrated circuit device including the selected feature, wherein the placing step includes placing the mask at a skewed angle relative to the selected feature.
A method for enabling measurement access to a feature of an integrated circuit device on a wafer, comprising:
- selecting a feature of an integrated circuit device on a wafer;
- and
- providing access to the selected feature for measurement thereof without destroying the wafer, including removing a portion of the integrated circuit device adjacent to the selected feature, wherein the selected feature includes a portion of a trench.
Dependencies are inferred from the claim text.