Substrate container and method of dehumidifying substrate container

A method of dehumidifying a substrate container comprising:

• producing a circulating air flow in a container housing, said container housing having an opening for storing a substrate therethrough and a cover sealingly covering said opening;
• and
• applying a voltage to a solid polymer electrolyte film placed in contact with said circulating air flow to decompose water in said circulating air flow thereby to dehumidify a space in said container housing;
• wherein a substrate holder holds said substrate substantially parallel to said circulating path.

A substrate container comprising:

• a container housing having an opening for storing a substrate theretrough and a cover sealingly covering said opening;
• a fan motor mounted in said container housing for producing a circulating path of air in contact with the substrate in said container housing, wherein a substrate holder holds said substrate substantially parallel to said circulating path;
• and
• a dehumidifying unit for dehumidifying a space in said container housing, said dehumidifying means comprising a solid polymer electrolyte film disposed in said circulating path and a power supplying unit for applying a voltage to said solid polymer electrolyte film to decompose water in air flowing in said circulating path thereby to dehumidify a space in said container housing.