Teaching tool for a robot arm for wafer reaction ovens
AssigneeMosel Vitelic, Inc.
InventorsHsien Hsiang Lin, Thanku Shieh, Wen-Ching Wu, Hsiao-Ping Hsieh
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AssigneeMosel Vitelic, Inc.
InventorsHsien Hsiang Lin, Thanku Shieh, Wen-Ching Wu, Hsiao-Ping Hsieh
Estimating the term…
A teaching tool for a robot arm for wafer reaction ovens is provided to anchor the robot arm with respect to a tray located inside a reaction oven. The teaching tool provides an upper flange for maintaining a spacing between a handle of the robot arm and a door of the oven, a position width for keeping the teaching tool aligning with a center line of the tray, and a lower tunnel aligning with the center line for allowing a blade of the robot arm to contact closely and horizontally from a lower position and thus for maintaining a position height between the blade and a floor of the reaction oven. By providing the teaching tool, easy blind calibration with multiple contact points between the robot arm and the oven can be performed so that possible efficiency down and cost up from an ill-calibration can be reduced to a minimum.
A teaching tool for a robot arm for wafer reaction ovens, as a unique piece for being applied while calibrating a robot arm to anchor the robot arm with a blade with respect to a tray located inside a reaction oven, comprising:
Dependencies are inferred from the claim text.