Buffer system for a wafer handling system field of the invention
AssigneeNova Measuring Instruments Ltd.
InventorsEli Haimovich, Eran Dvir
Life of this patent
Estimating the term…
Abstract
A buffer station for an article handling system, the handling system having a general path along which it moves when handling the article, the buffer station including at least two supporting assemblies including supporting elements forming a supporting plane each capable of supporting an article within the supporting plane and located so as to support the article within the general path, at least two receptacles for liquid in which the at least two supporting assemblies are disposed, and at least two drivers associated with the at least two supporting assemblies and the receptacles for shifting them in and out of the general path.
Claims14
A buffer station for an article handling system, the handling system having a general path along which it moves when handling the article, the buffer station comprising:
- at least two supporting assemblies comprising supporting elements forming a supporting plane each capable of supporting an article within said supporting plane and located so as to support said article within said general path;
- at least two receptacles for liquid in which said at least two supporting assemblies are disposed;
- and
- at least two drivers associated with said at least two supporting assemblies and said receptacles for shifting them in and out of said general path.
Dependencies are inferred from the claim text.