Microcantilever sensor

An array of microcantilevers for detecting analytes, comprising:

• a plurality of discrete sensing elements formed on a surface;
• a corresponding plurality of deflectable arms each being disposed in a rest position, each having one end fixedly coupled to a substrate and an overhang portion situated superjacent a corresponding sensing element and contacting said corresponding sensing element, each deflectable arm capable of deflecting responsive to a volumetric change in said corresponding sensing element;
• and
• detecting means capable of measuring the deflection of each deflectable arm out of each said rest position.

An array of microcantilevers for detecting analytes, comprising:

• a plurality of discrete sensing elements formed on a surface;
• a corresponding plurality of deflectable arms each being disposed in a rest position, each having one end fixedly coupled to a substrate and an overhang portion situated superjacent a corresponding sensing element and contacting said corresponding sensing element, each deflectable arm capable of deflecting responsive to a volumetric change in said corresponding sensing element;
• and
• detecting means capable of measuring the deflection of each deflectable arm out of each said rest position wherein each sensing element is different from the other sensing elements, and in which said deflectable arms each have one end fixedly coupled to a common substrate and said surface is formed on a further substrate situated adjacent said common substrate.

A method for detecting an analyte within a fluid medium, comprising:

• providing a deflectable microcantilever arm having one end fixedly coupled to a substrate, said microcantilever arm disposed in a rest position;
• forming a sensing element subjacent said arm and contacting an underside of said arm, said sensing element capable of at least one of vertical swelling and vertical contraction responsive to the presence of said analyte, said vertical swelling causing said microcantilever arm upward deflection and said vertical contraction causing said microcantilever arm downward deflection;
• introducing a fluid medium containing said analyte to said sensing element, said medium being one of a liquid and a vapor;
• and
• measuring said deflection of said microcantilever arm out of said rest position.

A method for detecting an analyte within a fluid medium, comprising:

• providing a deflectable microcantilever arm having one end fixedly coupled to a substrate, said microcantilever arm disposed in a rest position;
• forming a sensing element subjacent said arm and contacting an underside of said arm, said sensing element capable of at least one of vertical swelling and vertical contraction responsive to the presence of said analyte, said vertical swelling causing said microcantilever arm upward deflection and said vertical contraction causing said microcantilever arm downward deflection;
• introducing a fluid medium containing said analyte to said sensing element, said medium being one of a liquid and a vapor;
• and
• measuring said deflection of said microcantilever arm out of said rest position wherein said microcantilever arm includes at least one measurable physical property which changes when said microcantilever arm deflects and said measuring comprises measuring a change in said at least one measurable physical property.