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US 6,521,102 B1Granted
Perforated anode for uniform deposition of a metal layer
AssigneeApplied Materials, Inc.
InventorYezdi N. Dordi
Life of this patent
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Abstract
An apparatus and associated method for use in a metal deposition cell during operation. The apparatus includes a perforated anode extending generally horizontally across the entire width of the metal deposition cell. Multiple perforations extend substantially vertically and are arranged to provide a substantially uniform electrolyte flow across the width of the metal deposition cell.
Claims20
An anode assembly, comprising:
- a perforated anode having a first side, a second side, and at least one perforation extending from the first side to the second side;
- and
- an anode casing extending adjacent the first side and a second portion extending into and lining the at least one perforation.
An electroplating cell, comprising:
- a perforated anode having a plurality of perforations configured to pass a plating solution therethrough;
- an anode casing configured to form cylindrical sidewalls around the plurality of perforations and reduce chemical reactions between the anode and the plating solution;
- and
- a hydrophilic membrane disposed between the anode and plating solution inlet, wherein the hydrophilic membrane has a distance from the anode of less than about 0.5 cm.
1 more element
Dependencies are inferred from the claim text.