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US 6,509,955 B2Granted
Lens system for maskless photolithography
AssigneeBall Semiconductor, Inc.
InventorsWenhui Mei, Takashi Kanatake
Life of this patent
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Abstract
A system for performing digital lithography onto a subject is provided. The system utilizes pixel panels to generate pixel patterns. Mirrors are utilized to divert and align the pixel elements forming the patterns onto a subject. A gradient lens system positioned between the panels and the subject simultaneously directs the pixel elements to the subject. The pixel elements may overlapping, adjacent, or spaced as desired. The pixel elements may be directed to multiple surfaces simultaneously. One or more point array units may be utilized in the system to achieve higher resolution.
Claims21
A system for image-scanning a pixel-mask pattern onto a subject, the system comprising:
- first and second panels for generating first and second patterns, each pattern comprising a plurality of pixel elements;
- a first mirror for diverting the pixel elements of the first pattern to align with non-diverted pixel elements of the second pattern, wherein the mirror is disposed relative to the first and second panels to prevent the second panel from interfering with the first pattern and to prevent the first panel from interfering with the second pattern;
- a first gradient lens system positioned between the first and second panels and the subject for simultaneously directing the pixel elements to the subject;
- means for providing relative movement between the first and second panels and the subject to scan the pixel elements across the subject;
- and
- a pattern reducer positioned between the panels and the first gradient lens system for shrinking an effective size of the pixel mask pattern.
3 more elements
A system for image-scanning a pixel-mask pattern onto a subject, the system comprising:
- first and second panels for generating first and second patterns, each pattern comprising a plurality of pixel elements;
- a first mirror for diverting the pixel elements of the first pattern to align with the pixel elements of the second pattern;
- a first gradient lens system positioned between the first and second panels and the subject for simultaneously directing the pixel elements to the subject;
- means for providing relative movement between the first and second panels and the subject to scan the pixel elements across the subject;
- and
- a pattern reducer positioned between the panels and the gradient lens system for shrinking an effective size of the pixel mask pattern.
3 more elements
A system for image-scanning a pixel-mask pattern onto a subject, the system comprising:
- first, second, third and fourth panels for generating first, second, third, and fourth patterns, respectively, each pattern comprising a plurality of pixel elements;
- a first mirror for diverting the pixel elements of the first pattern to align with the pixel elements of the second pattern;
- a second mirror for diverting the pixel elements of the third pattern to align with the pixel elements of the fourth pattern;
- a first gradient lens system positioned between the first and second panels and the subject for simultaneously directing the pixel elements to the subject;
- a second gradient lens system positioned between the third and fourth panels and the subject for simultaneously directing the pixel elements to the subject;
- and
- means for providing relative movement between the first and second panels and the subject to scan the pixel elements across the subject,
- wherein the pixel elements from the first and second panels are scanned across a first surface of the subject, and the pixel elements from the third and fourth panels are scanned across a second surface of the subject, and
- wherein the first and second surfaces are on opposite sides of the subject.
6 more elements
A system for image-scanning a pixel-mask pattern onto a subject, the system comprising:
- first, second, third and fourth panels for generating first, second, third, and fourth patterns, respectively, each pattern comprising a plurality of pixel elements;
- a first mirror for diverting the pixel elements of the first pattern to align with the pixel elements of the second pattern;
- a second mirror for diverting the pixel elements of the third pattern to align with the pixel elements of the fourth pattern;
- a first gradient lens system positioned between the first and second panels and the subject for simultaneously directing the pixel elements to the subject;
- a second gradient lens system positioned between the third and fourth panels and the subject for simultaneously directing the pixel elements to the subject;
- and
- means for providing relative movement between the first and second panels and the subject to scan the pixel elements across the subject,
- wherein the pixel elements from the first and second panels are scanned across a first surface of the subject, and the pixel elements from the third and fourth panels are scanned across a second surface of the subject, and
- wherein the scanning occurs simultaneously on the first and second surfaces of the subject.
6 more elements
A system for image-scanning a pixel-mask pattern onto a subject, the system comprising:
- a point array unit, the unit including:
- a panel for generating the pattern, the pattern comprising a plurality of pixel elements;
- a first lens system positioned between the panel and the subject for directing the pixel elements to the subject;
- a second lens system for focusing the pixel elements;
- and
- a grating within the point array unit;
- and
- means for providing relative movement between the unit and the subject to scan the pixel elements across the subject.
5 more elements
An imaging system for projecting a plurality of pixel patterns onto a subject during photolithography, the system comprising:
- first, second and third panels having first, second and third portions, respectively, for projecting first, second and third pixel patterns, wherein each of the first, second and third portions is smaller than its respective panel;
- a first reflection means for directing the first pixel pattern towards the subject;
- and
- a second reflection means for directing the third pixel pattern towards the subject;
- wherein the first panel is rotated relative to the second panel and wherein the third panel is rotated relative to the first and second panels, so that the first, second and third pixel patterns can be simultaneously projected onto adjacent portions of the subject without physical interference from the other panels.
2 more elements
Dependencies are inferred from the claim text.