Guideless stage

A stage assembly comprising:

• a first stage assembly movable along a first axis;
• a first moving means for moving the first stage assembly at least along the first axis;
• a second stage assembly coupled to the first stage assembly;
• a second moving means for moving the second stage assembly relative to the first stage assembly along a second axis, the second axis differing from the first axis;
• and
• a reaction force canceling means for reducing disturbance caused by the second moving means, the reaction force canceling means including actuating means and being movable relative to the second stage assembly along the second axis.

A stage assembly comprising:

• a first stage assembly movable along a first axis;
• a first mover connected to the first stage assembly, the first mover moving the first stage assembly at least along the first axis;
• a second stage assembly that moves substantially concurrently with the first stage assembly along the first axis;
• a second mover that is connected to the second stage assembly and moves the second stage assembly relative to the first stage assembly along a second axis, the second axis differing from the first axis;
• and
• a reaction assembly including an actuator and being movable relative to the second stage assembly along the second axis and connected to the second mover, the reaction assembly inhibiting disturbances caused by the second mover from being transferred to the first stage assembly.

A method for making a stage assembly, the method comprising the steps of:

• providing a first stage assembly that is movable along a first axis;
• connecting a first mover to the first stage assembly, the first mover moving the first stage assembly at least along the first axis;
• coupling a second stage assembly to the first stage assembly;
• connecting a second mover to the second stage assembly, the second mover moving the second stage assembly relative to the first stage assembly along a second axis, the second axis differing from the first axis;
• and
• connecting a reaction force canceling assembly to the second mover, the reaction force canceling assembly including an actuator and being movable relative to second stage assembly along the second axis and reducing disturbances caused by the second mover.

A method for making a stage assembly, the method comprising the steps of:

• providing a first stage assembly that is movable along a first axis;
• connecting a first moving means to the first stage assembly, the first moving means moving the first stage assembly at least along the first axis;
• coupling a second stage assembly to the first stage assembly;
• connecting a second moving means to the second stage assembly, the second moving means moving the second stage assembly relative to the first stage assembly along a second axis, the second axis differing from the first axis;
• and
• connecting a reaction force canceling means to the second moving means, the reaction force canceling means including actuating means and being movable relative to a second stage assembly along the second axis and reducing disturbance caused by the second moving means.