Locking mechanism for detachably securing a wafer carrier to a conveyor
AssigneeLam Research Corporation
InventorGlenn W. Travis
Life of this patent
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Abstract
A system and method for detachably securing a locking mechanism to a housing is provided. The locking mechanism comprises a cam ring, a retention ring and a plurality of locking elements. The cam ring and the retention ring are slidably coupled and concentric with respect to each other. The locking elements are movably disposed within the cam ring and the retention ring. When a rotational force is applied to the locking mechanism, the locking elements move between a first position and a second position. The housing is positioned adjacent the locking elements and concentric with the locking mechanism. In the second position, the locking elements engage an engagement mechanism on the housing.
Claims28
A locking mechanism capable of being detachably secured to a housing comprising:
- a cam ring comprising a plurality of cam slots each having an angular inner surface;
- a plurality of locking elements movably disposed within the cam slots adjacent the angular inner surface;
- a retention ring slidably coupled to the cam ring, the retention ring having a plurality of apertures adapted to retain the locking elements within the cam slots, wherein the retention ring is concentric with the cam ring such that the apertures are operatively positioned adjacent the cam slots and the locking elements are operatively movable between a first position wherein a portion of the locking elements only protrude from the retention ring in a first direction and a second position wherein the locking elements also protrude from the retention ring in an opposite direction;
- and
- an engagement mechanism on the housing for engagement with the locking elements when the housing is positioned concentrically with respect to the retention ring such that the engagement mechanism is adjacent the apertures.
A locking mechanism for detachably securing a wafer carrier to a conveyor in a chemical mechanical polishing system, wherein the locking mechanism is coupled to the conveyor and comprises:
- a retention ring;
- a plurality of locking elements disposed within the retention ring;
- a cam ring slidably coupled with the retention ring that is concentric therewith and includes a plurality of cam slots, wherein the cam slots include an angular inner surface and are operatively positioned adjacent the locking elements, wherein the locking elements are operably movable between a first position wherein the locking elements are away from the wafer carrier and a second position wherein the locking elements engage the wafer carrier;
- and
- an engagement mechanism located on the wafer carrier that is adapted to fixedly engage the locking elements when the wafer carrier is operatively disposed concentric with the retention ring and adjacent to the locking elements.
A locking mechanism capable of being detachably secured to a housing comprising:
- a cam ring comprising a plurality of cam slots;
- a plurality of locking elements movably disposed within the cam slots;
- and
- a retention ring slidably coupled to the cam ring, the retention ring operable to retain the locking elements in the cam slots,
- the cam ring rotatable in a first direction with respect to the retention ring to urge the locking elements into engagement with the housing,
- the cam ring rotatable in a second direction with respect to the retention ring to allow the locking elements to disengage from the housing.
Dependencies are inferred from the claim text.