Method and apparatus for conserving energy within a process chamber
AssigneeApplied Materials, Inc.
InventorsNelson Yee, Matthew Tsai
Life of this patent
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Abstract
An apparatus for redirecting energy applied to a susceptor of a substrate process chamber. Specifically, a shield comprising one or more reflector members is disposed below said susceptor whereby thermal energy radiated from a backside of said susceptor is reflected back to the susceptor. The apparatus comprises a bracket member attached to the reflector members and a pedestal assembly disposed below said susceptor. The reflector members are fabricated from a low emissivity material such as stainless steel (which can be polished to a highly reflective condition). Also, the first and second reflector members can be annealed.
Claims18
Apparatus for redirecting energy applied to a susceptor attached to a pedestal assembly in a substrate process chamber, the apparatus comprising:
- a bracket member attached to the pedestal assembly;
- the bracket member further comprising a first horizontal portion and a second horizontal portion, said first horizontal portion further comprising a first flange and a second flange and said second horizontal portion further comprising a first flange and a second flange, said first and second flanges of the first horizontal portion further comprising a plurality of flange openings and said first and second flanges of the second horizontal portion further comprising a plurality of flange openings;
- and
- a first reflector member attached to and supported by said bracket member and a second reflector member attached to and supported by said bracket member, wherein the first reflector member has a first end and a second end and the second reflector member has a first end and a second end, each of said first and second ends of said first and second reflector members is further provided with a flange and the flange on the first end of the first reflector member is further provided with a plurality of openings that coincide with the plurality of openings on the second flange of the first horizontal portion of the bracket member and the flange on the second end of the first reflector member is further provided with a plurality of openings that coincide with the plurality of openings on the second flange of the second horizontal portion of the bracket member.
Dependencies are inferred from the claim text.