Process and apparatus for making oriented crystal layers
AssigneeThe Regents of the University of California
InventorRobert W. Springer
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Abstract
Thin films of single crystal-like materials are made by using flow-through ion beam deposition during specific substrate rotation around an axis in a clocking action. The substrate is quickly rotated to a selected deposition position, paused in the deposition position for ionized material to be deposited, then quickly rotated to the next selected deposition position. The clocking motion can be achieved by use of a lobed cam on the spindle with which the substrate is rotated or by stopping and starting a stepper motor at long and short intervals. Other symmetries can be programmed into the process, allowing virtually any oriented inorganic crystal to be grown on the substrate surface.
Claims16
An apparatus for forming oriented crystal layers comprising:
- (a) a substrate holder attached to the shaft of a vacuum motor;
- (b) a vacuum switch operably connected to said vacuum motor;
- (c) a timing device connected to said vacuum switch;
- (d) a lobed cam rotatably mounted on said shaft of said vacuum motor;
- (e) a cam follower which turns said vacuum motor switch to a closed position each time it reaches a low point of the cam;
- and
- (f) an ion beam source positioned to contact a workpiece in said substrate holder with electrons and ions.
An apparatus for forming oriented crystal layers comprising:
- (a) a stepper motor;
- (b) electronics to drive said stepper motor;
- (c) a substrate holder attached to the shaft of said motor;
- and
- (d) an ion beam source positioned to deposit ions onto a substrate in said substrate holder.
Dependencies are inferred from the claim text.