Method of preparing a compound semiconductor crystal
AssigneeSumitomo Electric Industries, Ltd.
InventorsTomohiro Kawase, Shinichi Sawada, Masami Tatsumi
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AssigneeSumitomo Electric Industries, Ltd.
InventorsTomohiro Kawase, Shinichi Sawada, Masami Tatsumi
Estimating the term…
A method of preparing a compound semiconductor crystal is able to dope the crystal with carbon with high reproducibility. The method includes the steps of sealing a carbon oxide gas of a predetermined partial pressure and a compound semiconductor material in a gas-impermeable airtight vessel, increasing the temperature of the vessel to melt the compound semiconductor material sealed in the vessel, and then decreasing the temperature of the vessel to solidify the melted compound semiconductor material to grow a compound semiconductor crystal containing a predetermined amount of carbon. With this method, a compound semiconductor crystal with a carbon concentration of 0.1×1015cm−3 to 20×1015cm−3 is prepared with high reproducibility.
A method of preparing a compound semiconductor crystal containing carbon, comprising the following steps:
Dependencies are inferred from the claim text.