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AssigneeMitsubishi Materials Corporation
InventorsAtsushi Itsuki, Taiji Tachibana, Katsumi Ogi
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The present invention provides a solution suitable for forming a composite oxide type dielectric thin film containing at least one organometallic compound dissolved in at least one solvent selected from the group consisting of cyclic or acyclic diethers, alkyl-substituted cyclic monoethers, mono- or di-branched alkyl monoethers, alkoxy alcohols, diols, and acetoacetic esters, or dissolved in a solvent mixture comprising at least one solvent selected from the group consisting of cyclic and acyclic saturated hydrocarbons, and at least one solvent selected from the group consisting of cyclic or acyclic diethers, alkyl-substituted cyclic monoethers, mono- or di-branched alkyl monoethers, alkoxy alcohols, diols, acetoacetic esters, and unsubstituted or alkyl-substituted pyridine. These solutions can be used in a metal oxide chemical deposition method (a MOCVD method, a chemical vapor deposition method using an organometallic compound) to prepare composite oxide (for example, barium strontium titanate) type dielectric thin films on substrates.
A solution suitable for forming a composite oxide dielectric thin film, comprising at least one organometallic compound dissolved in a solvent mixture comprising at least one solvent selected from the group consisting of cyclic and acyclic saturated hydrocarbons, and at least one solvent selected from the group consisting of cyclic diethers, alkyl-substituted cyclic monoethers, mono- or di-branched alkyl monoethers, acetoacetic esters, and unsubstituted or alkyl-substituted pyridine, wherein the at least one organometallic compound includes a compound in which a metal atom combines with an organic group through an oxygen atom.
A solution suitable for forming a composite oxide dielectric thin film, comprising at least one organometallic compound dissolved in a solvent mixture comprising at least one solvent selected from the group consisting of cyclic and acyclic saturated hydrocarbons, and at least one solvent selected from the group consisting of alkyl-substituted cyclic monoethers, mono- or di-branched alkyl monoethers, and acetoacetic esters.
Dependencies are inferred from the claim text.