Microelectromechanical mirror and mirror array

A microelectromechanical mirror, comprising:

• a reference surface having a plurality of control electrodes;
• a support frame held above the reference surface by a plurality of standoff posts;
• a plurality of electrostatic actuators flexibly suspended from the support frame and respectively held over the plurality of control electrodes;
• a freely movable plate flexibly suspended from the plurality of electrostatic actuators and held above the reference surface;
• and
• a mirrored surface connected to the freely movable plate.

A freely movable plate, comprising:

• a plurality of actuators flexibly suspended over a reference surface from a support structure;
• a plurality of actuation means for respectively actuating the plurality of actuators;
• and
• a freely movable plate flexibly suspended from the plurality of actuators by a plurality of torsional plate flexures.

A microelectromechanical mirror, comprising:

• a plurality of actuators flexibly suspended over a reference surface from a support structure;
• a plurality of actuation means for respectively actuating the plurality of actuators;
• a freely movable plate flexibly suspended from the plurality of actuators by a plurality of torsional plate flexures;
• and
• a mirrored surface connected to the freely movable plate.

A microelectromechanical mirror array, comprising a plurality of microelectromechanical mirrors wherein each mirror comprises:

• a reference surface having a plurality of control electrodes;
• a support frame held above the reference surface by a plurality of standoff posts;
• a plurality of electrostatic actuators flexibly suspended from the support frame and respectively held over the plurality of control electrodes;
• a freely movable plate flexibly suspended from the plurality of electrostatic actuators and held above the reference surface;
• and
• a mirrored surface connected to the freely movable plate.

A microelectromechanical mirror array, comprising a plurality of microelectromechanical mirrors wherein each mirror comprises:

• a plurality of actuators flexibly suspended over a reference surface from a support structure;
• a plurality of actuation means for respectively actuating the plurality of actuators;
• a freely movable plate flexibly suspended from the plurality of actuators by a plurality of torsional plate flexures;
• and
• a mirrored surface connected to the freely movable plate.