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US 6,480,283 B1Granted
Lithography system using quantum entangled photons
AssigneeCalifornia Institute of Technology
InventorsColin Williams, Jonathan Dowling, Giovanni della Rossa
Life of this patent
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Abstract
A system of etching using quantum entangled particles to get shorter interference fringes. An interferometer is used to obtain an interference fringe. N entangled photons are input to the interferometer. This reduces the distance between interference fringes by n, where again n is the number of entangled photons.
Claims10
A quantum mechanically entangled lithographic etching device, comprising:
- a source of quantum mechanically-entangled particles with a wavelength λ;
- and
- an interferometer which produces an interference pattern by producing a phase shift between n of said entangled particles, where n>1, and using said phase shift to produce an interference fringe, where said interference fringe has bright spots and dark spots, an adjacent bright spot being spaced from one another by less than λ/2;
- and
- a lithographic etching device, producing a lithographic etch in a target using said interference pattern.
2 more elements
A lithography method, comprising:
- producing a plurality n of entangled particles with a wavelength λ;
- inputting said entangled particles into an interferometric device which produces a phase shift between different paths;
- obtaining an output of said interferometric device having a pattern spacing between parts of said pattern proportional to λ over 4N where N is the number of entangled particles;
- and
- using said output for lithography.
2 more elements
A method of carrying out quantum lithography, comprising:
- obtaining a plurality of entangled particles, which are quantum entangled with one another;
- establishing an interferometer system which is decoupled to its environment, and applying said entangled particles into said interferometer system to cause interference there, between to form interference fringes spaced from one another by λ over 4N where N is a number of decoupled photons;
- and
- using said interference fringes for lithography.
1 more element
Dependencies are inferred from the claim text.