Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stage
AssigneeCanon Kabushiki Kaisha
InventorNobushige Korenaga
Life of this patent
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Abstract
A stage system includes a movable stage, a first driving mechanism, having magnet and a coil unit, for moving the stage along a predetermined direction, the coil unit including a coil and a yoke, wherein the magnet is connected to the stage side, and a second driving mechanism for moving the coil unit along the predetermined direction. While a position or a speed of the stage is controlled as the stage is driven through the first driving mechanism, the coil unit is moved substantially in synchronism with the stage.
Claims26
A stage system, comprising:
- a movable stage;
- a first driving mechanism, having a magnet and a coil unit, for moving said stage along a predetermined direction, said coil unit including a coil and a yoke, wherein said magnet is connected to the stage side;
- and
- a second driving mechanism for moving said coil unit along the predetermined direction,
- wherein, while a position or a speed of said stage is controlled as said stage is driven through said first driving mechanism, said coil unit is moved substantially in synchronism with said stage.
An exposure apparatus, comprising:
- a stage being movable while holding one of a wafer and a reticle thereon;
- a first driving mechanism, having a magnet and a coil unit, for moving said stage along a predetermined direction, said coil unit including a coil and a yoke, wherein said magnet is connected to the stage side;
- and
- a second driving mechanism for moving said coil unit along the predetermined direction,
- wherein, while a position or a speed of said stage is controlled as said stage is driven through said first driving mechanism, said coil unit is moved substantially in synchronism with said stage.
An exposure apparatus according to clams 13, wherein said second driving mechanism includes a feed screw.
Dependencies are inferred from the claim text.