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US 6,479,879 B1Granted
Low defect organic BARC coating in a semiconductor structure
AssigneeAdvanced Micro Devices, Inc.
InventorsChristopher Lee Pike, Alexander H. Nickel
Life of this patent
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Abstract
In providing a bottom antireflective coating (BARC) in a semiconductor structure, a primer layer, for example, hexamethyldisilazane (HMDS), is provided on a substrate, and the BARC is formed on the primer. This results in a substantially defect free BARC layer, having a more uniform reflectivity which in turn leads to improve to photolithographic pattern resolution.
Claims10
A semiconductor structure comprising:
- a substrate,
- a primer on the substrate;
- and
- an antireflective coating on the primer.
1 more element
Dependencies are inferred from the claim text.