Electrode and a capacitor and DRAM containing the same
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorKeiichiro Kashihara
Life of this patent
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Abstract
A Layered product (70) is formed on a high-dielectric-constant layer (64). The layered product has a layered structure consisting of an upper electrode (71), a barrier layer (72), a stopper layer (73) and an adhesion layer (74) in this order from the near side of the high-dielectric-constant layer (64). For the high-dielectric-constant layer (64), the upper electrode (71), the barrier layer (72), the stopper layer (73) and the adhesion layer (74), BST, Pt or PtOa, TiN or TiSiN, PtSixOyNz (0<x, y, z<1) and Tin are used, respectively. Since it is possible to reduce a stress on the stopper layer (73), the stress applied to the high-dielectric-constant layer (64) can be suppressed, to prevent deterioration in dielectric characteristics.
Claims19
An electrode structure of capacitor, having a first electrode layer;
- and a second electrode layer including platinum, silicon and at least one of oxygen and nitrogen, in this order from the side in contact with a dielectric layer of said capacitor, wherein
- said second electrode layer has a higher composition ratio of at least one of oxygen and nitrogen on the near side from said first electrode layer than on the far side thereof.
A capacitor, comprising:
- a dielectric layer;
- a first electrode layer formed on said dielectric layer;
- and
- a second electrode layer formed on said first electrode layer, including platinum, silicon and at least one of oxygen and nitrogen,
- wherein said second electrode layer has a higher composition ratio of at least one of oxygen and nitrogen on the near side from said first electrode layer than on the far side thereof.
A DRAM comprising:
- a capacitor having a dielectric layer, a first electrode layer formed on said dielectric layer, and a second electrode layer formed on said first electrode layer, including platinum, silicon and at least one of oxygen and nitrogen, wherein said second electrode layer has a higher composition ratio of at least one of oxygen and nitrogen on the near side from said first electrode layer than on the far side thereof.
An electrode structure comprising:
- a first electrode layer;
- and
- a second electrode layer comprising platinum, silicon, and oxygen, wherein said second electrode layer has a higher composition ratio of oxygen on the near side from said first electrode layer than on the far side thereof, and wherein said second electrode layer contains two layers, in which a first layer is located on the near side of said first electrode layer and a second layer is located on the far side thereof, and said first layer has a higher composition ratio of oxygen than said second layer.
An electrode structure comprising:
- a first electrode layer;
- and
- a second electrode layer comprising platinum, silicon, oxygen and nitrogen.
An electrode structure comprising:
- a first electrode layer;
- and
- a second electrode layer comprising platinum, silicon and oxygen,
- wherein said second electrode layer has a-higher composition ratio of oxygen on the near side from said first electrode layer than on the far side thereof.
An electrode structure comprising:
- a first electrode layer;
- and
- a second electrode layer comprising platinum, silicon, and oxygen, wherein said second electrode layer has a higher composition ratio of oxygen on the near side from said first electrode layer than on the far side thereof, and
- wherein said second electrode layer contains two layers, in which a first layer is located on the near side of said first electrode layer and a second layer is located on the far side thereof, and said first layer has a higher composition ratio of oxygen than said second layer.
An electrode structure comprising:
- a first electrode layer;
- and
- a second electrode layer comprising platinum, silicon, and oxygen, wherein said second electrode layer has a higher composition ratio of oxygen on the near side from said first electrode layer than on the far side thereof,
- wherein said second electrode layer contains two layers, in which a first layer is located on the near side of said first electrode layer and a second layer is located on the far side thereof, and said first layer has a higher composition ratio of oxygen than said second layer, and
- wherein said second layer also works as an adhesion layer.
Dependencies are inferred from the claim text.