Probe and information recording/reproduction apparatus using the same
AssigneeCanon Kabushiki Kaisha
InventorsHiroo Azuma, Kiyoshi Takimoto, Takehiko Kawasaki, Yasuhiro Shimada, Takeo Yamazaki
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AssigneeCanon Kabushiki Kaisha
InventorsHiroo Azuma, Kiyoshi Takimoto, Takehiko Kawasaki, Yasuhiro Shimada, Takeo Yamazaki
Estimating the term…
Probe including a cantilever having a movable end and formed from an elastic body, an electroconductive sensing needle arranged at the movable end of the cantilever, and a field effect transistor arranged at the movable end of the cantilever and having a gate electrode electronically connected to the electroconductive sensing needle. The probe may further comprise another field effect transistor formed on the cantilever and having its drain electrically connected to the sensing needle. The probe may be used in an information recording/reproduction apparatus.
A probe comprising:
A method of manufacturing a probe comprising steps of:
Dependencies are inferred from the claim text.