Temperature compensating thin-film capacitor

Abstract

The present invention provides a thin-film capacitor which can easily meet requirements of reduction in size, thickness, and weight and which can perform temperature compensation. In addition to the features described above, the present invention provides a thin-film capacitor having a superior Q factor in a high frequency band. The thin-film capacitor of the present invention has at least one first dielectric thin-film and at least one second dielectric thin-film having a dielectric constant different from that of the first dielectric thin-film, wherein these thin-films are provided between a pair of electrodes. In addition, in the present invention, the absolute value of the temperature coefficient of capacitance of the first dielectric thin-film is 50 ppm/° C. or less, and the temperature coefficient of capacitance of the second dielectric thin-film is a negative value and has an absolute value of 500 ppm/° C. or more.

Dependencies are inferred from the claim text.