Process for fabricating a floating gate of a flash memory in a self-aligned manner

Abstract

The present invention provides a process for fabricating a floating gate of a flash memory. First, an isolation region is formed in a semiconductor substrate and the isolation region has a height higher than the substrate. A gate oxide layer and a first polysilicon layer are then formed. The first polysilicon layer is formed according to the contour of the isolation region to form a recess in the first polysilicon layer. A sacrificial insulator is filled into the recess. The first polysilicon layer is then selectively removed in a self-aligned manner using the sacrificial insulator as a hard mask to expose the isolation region. A polysilicon spacer is formed on the sidewalls of the first polysilicon layer. A first mask layer is formed on the isolation region, the sacrificial insulator in the recess is removed, and a floating gate region is defined. Then, the surfaces of the first polysilicon layer and polysilicon spacer in the floating gate region are oxidized to form a polysilicon oxide layer. Finally, the polysilicon oxide layer is used as a mask to pattern the underlying first polysilicon layer and polysilicon spacer in a self-aligned manner to form a floating gate. During the oxidation process, the polysilicon spacer of the present invention serves as a buffer layer, which is oxidized and protects the floating gate from being oxidized. Thus, the floating gate and STI overlay, and current leakage caused by insufficient overlay is prevented.

Dependencies are inferred from the claim text.