Method for fabricating cladding layer in top conductor
AssigneeHewlett-Packard Company
InventorsJanice H. Nickel, Thomas C. Anthony
Life of this patent
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Abstract
A method for cladding two or three sides of a top conductor for a magnetic memory device in ferromagnetic material includes forming a trench with side walls in a coating layer above the memory device. A first ferromagnetic material is deposited along the side walls of the trench. Any ferromagnetic material in a bottom of the trench can be removed. A conductor material is deposited in the trench over the memory device. A second ferromagnetic material is deposited over the conductor material in the trench to form a cladding of the ferromagnetic material around three side of the conductor.
Claims27
A method for cladding at least two sides of a top conductor for a memory device in ferromagnetic material, the method comprising the steps of:
- a) forming a trench with side walls in a coating layer above the memory device;
- b) depositing a ferromagnetic material only along the side walls of the trench;
- c) depositing a conductor material in the trench between the ferromagnetic material along the side walls of the trench whereby a cladding of the ferromagnetic material is formed on two sides of the top conductor.
A method for fabricating a ferromagnetic cladding about at least two sides of a top conductor of a magnetic RAM structure, the method comprising the steps of:
- a) providing a magnetic RAM structure;
- b) depositing a coating layer over the magnetic RAM structure;
- c) forming a trench with side walls and a bottom in the coating layer over the magnetic RAM structure;
- d) depositing a ferromagnetic cladding material along the side walls of the trench;
- e) removing at least a portion of any ferromagnetic cladding material from the bottom of the trench over the magnetic RAM structure while, leaving the ferromagnetic cladding material along the side walls of the trench;
- and
- f) depositing a conductor material in the trench over the magnetic RAM structure.
A method for fabricating a ferromagnetic cladding about a top and opposite sides of a top conductor of a magnetic RAM structure, the method comprising the steps of:
- a) providing a magnetic RAM structure disposed on a substrate;
- b) depositing a coating layer over the magnetic RAM structure and the substrate;
- c) forming a trench with slide walls and a bottom in the coating layer over the magnetic RAM structure;
- d) depositing a ferromagnetic cladding material over the coating layer and the magnetic RAM structure, and along the side walls of the trench;
- e) removing at least a portion of the ferromagnetic cladding material from the bottom of the trench over the magnetic RAM structure, and from the coating layer, while leaving the ferromagnetic cladding material along the side walls of the trench;
- f) depositing a conductor material over the coating layer and in the trench over;
- the magnetic RAM structure;
- g) polishing the conductor material to remove any conductor material over the coating layer and over an upper portion of the ferromagnetic cladding material along the side walls of the trench;
- h) depositing a layer of ferromagnetic cladding material over the coating layer, the conductor material in the trench, and the top portion of the ferromagnetic cladding material along the side walls of the trench;
- and
- i) polishing the layer of ferromagnetic cladding material to remove any ferromagnetic cladding material over the coating layer while leaving a portion of the layer of ferromagnetic cladding material over the conductor material in the trench.
Dependencies are inferred from the claim text.