A method for the preparation of a radiation-sensitive composition comprising mixing at least one novolak, at least one naphthoquinone diazide derivative and a copolymer consisting of the units A, B and C wherein unit A is present in an amount of 5 to a maximum of 50 mol % and has the following formula:
- wherein R1 and R4 are selected such that the homopolymer of A is alkali-soluble, unit B is present in an amount of 20-70 mol % and has the following formula:
- wherein R2, R6 and R7 are selected such that the homopolymer of B has a glass transition temperature above 100° C.,
- and unit C is present in an amount of 10-50 mol % and has the following formula:
- wherein R3 and R5 are selected such that the homopolymer of C is water-soluble, with the proviso that unit C is different from unit A and subsequently dissolving the solids components in an organic solvent.