Pellicle and method for manufacture thereof
AssigneeAsahi Glass Company, Limited
InventorsYoshiaki Ikuta, Shinya Kikugawa, Hitoshi Mishiro, Hiroshi Arishima, Kaname Okada, Katsuhiro Matsumoto
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Abstract
It is characterized by having a pellicle sheet made of a synthetic quartz glass having an OH group concentration of at most 100 ppm and containing substantially no oxygen deficient defect. It is particularly preferred that the OH group concentration is at most 10 ppm, and the internal transmittance is at least 80%/cm at a wavelength of 157 nm.
Claims15
A pellicle which comprises a pellicle frame and a pellicle sheet made of a synthetic quartz glass, attached to an opening of the pellicle frame, wherein the pellicle sheet is made of a synthetic quartz glass having a OH group concentration of at most 100 ppm and containing substantially no oxygen deficient defect.
Dependencies are inferred from the claim text.