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US 6,474,570 B2Granted
Flexible nozzle system for gas distribution plate of plasma reaction chamber
AssigneeMacronix International Co., Ltd.
InventorChien-Wei Chen
Life of this patent
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Abstract
A flexible nozzle system for the gas distribution plate of a plasma reaction chamber. The gas distribution plate is a metal plate having a plurality of clamping holes and a plurality of removable nozzle modules inserted into the clamping holes.
Claims12
A gas distribution structure of a plasma reaction chamber, comprising:
- a metal plate having a plurality of nozzle module clamping holes for distributing gas, on which an anodized film is coated;
- and
- a plurality of removable nozzle modules, each of the removable nozzle module comprising:
- a cap section;
- an engaging section joined to the cap section;
- and
- a nozzle hole in the nozzle module that links up both the cap section and the engaging section and permits a gas to pass through, wherein each removable nozzle module engages with the nozzle module clamping holes onto the metal plate and covers the anodized film lining the nozzle module clamping holes and rims thereof.
4 more elements
Dependencies are inferred from the claim text.