System and method for integrated singulation and inspection of semiconductor devices
AssigneeAdvanced Micro Devices, Inc.
InventorDean Tran
Life of this patent
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AssigneeAdvanced Micro Devices, Inc.
InventorDean Tran
Estimating the term…
A method and system for an integrated singulation process for electrically testing semiconductor devices in a strip, singulating the semiconductor devices and inspecting the semiconductor devices. An electrical tester marks a code on the semiconductor devices indicating whether each semiconductor device passed an electrical test. An optical code reader reads the code and stores the test results in memory. A singulation machine singulates the semiconductor devices into individual semiconductor devices and a sorter discards the semiconductor devices which failed the electrical tests. An inspection machine inspects the dimensions of each semiconductor device and a sorter discards the semiconductor devices which failed the inspection. The inspection machine outputs the semiconductor devices which passed both the electrical test and inspection.
An integrated singulation machine comprising:
An integrated singulation system comprising:
A method for inspecting semiconductor devices, comprising the steps of:
Dependencies are inferred from the claim text.