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AssigneeJapan Pionics Co., Ltd.
InventorsYukichi Takamatsu, Takeo Yoneyama, Koji Kiriyama, Akira Asano, Kazuaki Tonari, Mitsuhiro Iwata
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There are disclosed a vaporizer wherein at least a portion of a CVD material feed portion in contact with a CVD material is constituted of a corrosion resistant synthetic resin; and an apparatus for vaporizing and supplying which comprises a cooler and the vaporizer wherein the inside of the CVD material feed portion of the vaporizer and the surface on the side of the vaporization chamber of the CVD material feed portion are constituted of a corrosion resistant synthetic resin; the feed portion in contact with the outside of the vaporizer is constituted of a metal; and the CVD material feed portion which is constituted of a metal and which undergoes heat transfer from the heating means upon heating the vaporization chamber can be cooled with a cooler. The vaporizer and apparatus, when used for supplying a gaseous CVD-material to CVD equipment for producing semiconductors, enables the CVD material to be efficiently vaporized and supplied at desirable concentration and flow rate without causing deposit or adhesion of the CVD material at a CVD material feed port even if a solid CVD-material is used.
A vaporizer which comprises a vaporization chamber for a CVD material, a CVD material feed portion for supplying the vaporization chamber with the CVD material, a vaporized gas exhaust port and a heating means for heating the vaporization chamber, wherein at least a portion of the CVD material feed portion in contact with the CVD material is constituted of a material comprising a corrosion resistant synthetic resin, wherein the at least a portion of the CVD material feed portion is equipped with a passageway adapted for mixing the CVD material and a carrier gas with each other inside the CVD material feed portion, and thereafter the mixture is supplied to the vaporization chamber.
A vaporizer which comprises a vaporization chamber for a CVD material, a CVD material feed portion for supplying the vaporization chamber with the CVD material, a vaporized gas exhaust port and a heating means for heating the vaporization chamber, wherein the inside of the CVD material feed portion and the surface on the side of the vaporization chamber of the CVD material feed portion are constituted of a material comprising a corrosion resistant synthetic resin, and the CVD material feed portion in contact with the outside of the vaporizer is constituted of a metal, wherein the CVD material feed portion is equipped with a passageway adapted for mixing the CVD material and a carrier gas with each other inside the CVD material feed portion, and thereafter the mixture is supplied to the vaporization chamber.
An apparatus for vaporizing and supplying which comprises a cooler and a vaporizer that harbors a vaporization chamber for a CVD material, a CVD material feed portion for supplying the vaporization chamber with the CVD material, a vaporized gas exhaust port and a heating means for heating vaporized gas exhaust port and a heating means for heating the vaporization chamber, wherein the inside of the CVD material feed portion of the vaporizer and the surface on the side of the vaporization chamber of the CVD material feed portion are constituted of a material comprising a corrosion resistant synthetic resin;
Dependencies are inferred from the claim text.