Lactone compounds having alicyclic structure and their manufacturing method
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana, Jun Hatakeyama
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Abstract
Lactone compounds of formula (1) are novel and useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography. Letter k is 0 or 1 and m is an integer of 1-8.
Claims4
A lactone compound of the following general formula (1):
- wherein k is 0 or 1 and m is an integer of 1 to 8.
A method for preparing a lactone compound of the following general formula (1), comprising the steps of reacting an oxirane compound of the following general formula (2) with a metallomalonate to form a hydroxy diester compound of the following general formula (3), followed by hydrolysis, decarboxylation and lactonization:
- wherein k is 0 or 1, m is an integer of 1 to 8, R is alkyl, M is Li, Na, K, MgY or ZnY, and Y is halogen.
A method for preparing a lactone compound of the following general formula (1), comprising the steps of reacting an organometallic compound of the following general formula (4) with a 3-alkoxycarbonylpropionyl chloride to form a keto ester compound of the following general formula (5), followed by reduction and lactonization:
- wherein k is 0 or 1, m is an integer of 1 to 8, R is alkyl, M is Li, Na, K, MgY or ZnY, and Y is halogen.
A method for preparing a lactone compound of the following general formula (1), comprising the steps of reacting an aldehyde compound of the following general formula (6) with lithium 3-lithiopropionate to form a hydroxycarboxylic acid compound of the following general formula (7), followed by lactonization:
- wherein k is 0 or 1 and m is an integer of 1 to 8.
Dependencies are inferred from the claim text.